Probe current, probe size, and the practical brightness for probe forming systems

Probe size, shape, and current are important parameters for the performance of all probe forming systems such as the scanning (transmission) electron microscope, the focused ion beam microscope, and the Gaussian electron beam lithography system. Currently, however, the relation between probe current and probe size is ill defined. The key lies in...

Electron optics of microlenses with inclined beams

For multielectron beam systems with a single electron source, the outside beams need to be collimated before entering the individual microcolumns. As an alternative of the traditional multibeam source design where the broad beam from the source is collimated by a single lens, the broad beam can be first split in subbeams that are focused by a...

Source brightness and useful beam current of carbon nanotubes and other very small emitters

The potential application of carbon nanotubes as electron sources in electron microscopes is analyzed. The resolution and probe current that can be obtained from a carbon nanotube emitter in a low-voltage scanning electron microscope are calculated and compared to the state of the art using Schottky electron sources. Many analytical equations...