Multibeam scanning electron microscope: Experimental results

The authors present the first results obtained with their multibeam scanning electron microscope. For the first time, they were able to image 196 (array of 14×14) focused beams of a multielectron beam source on a specimen using single beam scanning electron microscope (SEM) optics. The system consists of an FEI Novanano 200 SEM optics column...

Reversible shape changes of the end facet on Schottky electron emitters

The Schottky electron source is predominant in today’s focused electron-beam equipment, but its properties are still not fully understood. Generally, its performance is predicted, assuming its tip end geometry is known and stable. In this work, it is shown that the size of the end facet (slowly) shrinks upon reduction in the extraction voltage...