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Van Bruggen, M.J. (author), Van Someren, B. (author), Kruit, P. (author)
Micro-Einzel lenses always suffer from chromatic and spherical aberration, even when the electron beam is exactly on the optical axis of the lens. When the inclination of the electron beam with respect to the lens axis increases, additional effects such as coma, astigmatism, and defocus start to dominate. An example of inclined electron beams in...
journal article 2009