Spatial mode projection for side-wall angle measurements

Finding a fast and precise method to measure the side-wall angle of periodic (or non-periodic) structures is still a very challenging problem in lithographic applications. For this reason, over the years, many techniques have been proposed to circumvent this limitation, with the final goal to give the most precise geometrical description of...

Demonstration of an optimised focal field with long focal depth and high transmission obtained with the Extended Nijboer-Zernike theory

In several optical systems, a specific Point Spread Function (PSF) needs to be generated. This can be achieved by shaping the complex field at the pupil. The Extended Nijboer-Zernike (ENZ) theory relates complex Zernike modes on the pupil directly to functions in the focal region. In this paper, we introduce a method to engineer a PSF using the...