Optimized 3D simulation method for modeling of out-of-plane radiation in silicon photonic integrated circuits

We present an accurate and fast 3D simulation scheme for out-of-plane grating couplers, based on two dimensional rigorous (finite difference time domain) grating simulations, the effective index method (EIM), and the Rayleigh-Sommerfeld diffraction formula. In comparison with full 3D FDTD simulations, the rms difference in electric field is...