Integrated Microstrip Lines With Co–Ta–Zr Magnetic Films

Thermal Issues in Micromachined Spiral Inductors for High-Power Applications

An experimental study of the self-heating of micromachined spiral inductors operated under high-power conditions is presented. Typical suspended spiral coils are shown to develop highly elevated temperatures (up to several hundred degrees) under the flow of a moderate to high (> 60 mA) dc current, which often applies to inductors in radio...

Magnetic-Multilayered Interconnects Featuring Skin Effect Suppression

A novel concept for a high-frequency, low-loss interconnect with significant skin effect suppression over a wide frequency band is presented. The concept is based on a multilayer comprising thin magnetic (Ni80Fe20) and metal (Cu) layers. The negative permeability of the magnetic layers leads to a nearcancellation of the overall permeability of...

High-resistivity nanogranular Co–Al–O films for high-frequency applications

This work presents a series of high-resistivity nanogranular Co–Al–O films with maximum resistivity of ? 110?m??cm. The films were deposited using pulsed dc reactive sputtering of a Co72Al28 target in an oxygen/argon ambient. The samples were characterized by scanning electron microscopy (SEM), M-H loop measurements, and s-parameter measurements...

Shape-induced ultrahigh magnetic anisotropy and ferromagnetic resonance frequency of micropatterned thin Permalloy films

Magnetic anisotropy Hk>200?Oe was observed from bar-shaped Permalloy strips. The film was deposited on sputtered Cr seed layer by electroplating under ? 800?Oe external magnetic field. Tiny degradation of Hk was observed after 30 min postannealing at 400?°C in the absence of external magnetic field. The Permalloy strip with in-plane aspect ratio...

10?GHz bandstop microstrip filter using excitation of magnetostatic surface wave in a patterned Ni78Fe22 ferromagnetic film

Various microstrips with a ferromagnetic core were designed and fabricated on a silicon substrate. The core was formed by a 0.5-?m-thick Ni78Fe22 film, patterned into rectangular prisms. Measurement results for attenuation constant versus frequency show a peak value of ? 50?dB/cm around 10?GHz. Electromagnetic simulations show that the...

Silicon micromachining of high aspect ratio, high-density through-wafer electrical interconnects for 3-D multichip packaging

Magnetic properties of electroplated nano/microgranular NiFe thin films for rf application

A granular NiFe thin film with large in-plane magnetic anisotropy and high ferromagnetic-resonance frequency developed for radio-frequency integrated circuit (IC) applications is presented. During the deposition, three-dimensional (3D) growth occurs, yielding NiFe grains (? ? 1.0??m). Nanonuclei (? ? 30–50?nm) are observed in single NiFe grains...

Spray coating of photoresist for pattern transfer on high topography surfaces

On the design of unilateral dual-loop feedback low-noise amplifiers with simultaneous noise, impedance, and IIP3 match

Surface-passivated high-resistivity silicon substrates for RFICs

Calculation of shape anisotropy for micropatterned thin Fe-Ni films for on-chip RF applications

Saddle add-on metallization for RF-IC technology

Photoresist coating methods for the integration of novel 3-D RF microstructures

Integrated tunable magnetic RF inductor