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Searched for: mods_originInfo_publisher_s%3A%22IOP%22
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An improved in-plane thermal folded V-beam actuator for optical fibre alignment
Finite element modelling and experimental characterization of an electro-thermally actuated silicon-polymer micro gripper
A dual-side fabrication method for silicon plate springs with high out-of-plane stiffness
An in-plane thermal unimorph using confined polymers
Actuated elastomers with rigid vertical electrodes
Lateral nano-Newton force-sensing piezoresistive cantilever for microparticle handling
In-package MEMS-based thermal actuators for micro-assembly
Spray coating of photoresist for pattern transfer on high topography surfaces
Searched for: mods_originInfo_publisher_s%3A%22IOP%22
(1 - 8 of 8)
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