Product-internal assembly functions: A novel micro-assembly concept applied to optical interconnects

In this project, the technical feasibility of a novel assembly concept was explored, in which microsystem-based self-assembly functionality is added to an existing product. The case considered is the accurate alignment of an optical fibre relative to a telecommunication laser source. In the most demanding cases this requires alignment accuracies...

Learning from nature: Biologically-inspired sensors

New emerging sensing applications demand novel sensors in micro-/nano-scale to enable integration and embedding into higher level structures or systems. Downsizing the structure will usually decrease the sensitivity of the sensors, since the sensitivity is a function of geometrical parameters, e.g. mass in the case of inertial sensing, and...

Micro-electro-mechanical actuators using confined polymers

Polymers can be used to constitute "artificial muscles" that actuate under an electric stimulus. These polymers include dielectric elastomers and thermally expandable polymers. They are insulating and relatively compliant. Their electric activation is enabled with integration of electrodes, heat conductors or heaters. However, the electrodes or...

Deep anisotropic dry etching of silicon microstructures by high-density plasmas

This thesis deals with the dry etching of deep anisotropic microstructures in monocrystalline silicon by high-density plasmas. High aspect ratio trenches are necessary in the fabrication of sensitive inertial devices such as accellerometers and gyroscopes. The etching of silicon in fluorine-based plasmas is isotropic. To obtain anisotropy the...