Functional materials for MEMS based gas sensors

A MEMS gas sensor consists of a transducer, mainly a resistive or capacitive transducer coated with a thin film of specific functional materials. Functional materials can change their electrical, optical, magnetic, or mechanical properties based on the stimuli received. In a chemi-resistive or chemi-capacitive gas sensing system, thin film of...

A Low-Power MEMS IDE Capacitor with Integrated Microhotplate: Application as Methanol Sensor using a Metal-Organic Framework Coating as Affinity Layer

Capacitors made of interdigitated electrodes (IDEs) as a transducer platform for the sensing of volatile organic compounds (VOCs) have advantages due to their lower power operation and fabrication using standard micro-fabrication techniques. Integrating a micro-electromechanical system (MEMS), such as a microhotplate with IDE capacitor,...