A MEMS Coriolis-Based Mass-Flow-to-Digital Converter for Low Flow Rate Sensing

This article presents a microelectromechanical system (MEMS) Coriolis-based mass-flow-to-digital converter (Φ DC) that can be used with both liquids and gases. It consists of a micromachined Coriolis mass flow sensor and a CMOS interface circuit that drives it into oscillation and digitizes the resulting mass flow information. A phase-locked...

A MEMS Coriolis Mass Flow Sensing System with Combined Drive and Sense Interface

This paper describes an interface circuit for a MEMS Coriolis mass flow sensor that combines both drive and sense circuitry. The MEMS sensor consists of a suspended resonant tube, which is read-out by comb capacitors and driven into oscillation by current flowing through a drive coil in a magnet field. The interface circuit comprises a low...