Zhang, B. (author), Wei, J. (author), Bottger, A.J. (author), van Zeijl, H.W. (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author) We report the design, fabrication and experimental investigation of a MEMS micro-hotplate (MHP) for fast time-resolved X-ray diffraction (TRXRD) study of Cu nanoparticle paste (nanoCu paste) sintering process. The device and its system are designed to have a 60 ms minimum time interval, uniform temperature distribution and variant gas...
conference paper 2019
