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Ye, Guigen (author), Fan, X. (author), Middelburg, L.M. (author), el Mansouri, B. (author), Poelma, René H. (author), Zhang, Kouchi (author)In this paper, stability and mechanistic simulations for a four-beam-mass-based MEMS gravimeter were conducted, and guidelines for the gravimeter design were proposed. Based on a prototyped MEMS device, the nonlinear finite element model was validated first against the experimental results. Then, we demonstrated three different scenarios in...journal article 2022
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Sajadi, B. (author)In the last decades, Micro-Electro-Mechanical Systems (MEMS) have drawn immense attention due to their potential use in a wide variety of modern applications, including micro-mechanical sensors and actuators. MEMS are devices combining mechanical and electrical components between 1 and 100 micrometers, all integrated into a single chip. The...doctoral thesis 2017
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Peters, T.J. (author), Tichem, M. (author)This paper reports on the progress related to a multichannel photonic alignment concept, aiming for sub-micrometer precision in the alignment of the waveguides of two photonic integrated circuits (PICs). The concept consists of two steps: chip-to-chip positioning and chip bonding provide a coarse alignment after which waveguide-to-waveguide...conference paper 2016