An Edgy Journey with Transition Metal Dichalcogenides: From Flakes to Nanopillars

The family of transitionmetal dichalcogenides offer a unique platformfor electronic and optical tunability due to the sensitivity to their dimensional configuration, edge terminations, and varying crystal phases. In this thesis we focus on structures based on the transition metal dichalcogenides MoS2 and WS2. We study how different crystal...

High resolution resist-free lithography in the SEM

Focussed Electron Beam Induced Processing is a high resolution direct-write nanopatterning technique. Its ability to fabricate sub-10 nm structures together with its versatility and ease of use, in that it is resist-free and implementable inside a Scanning Electron Microscope, make it attractive for a variety of applications in nanofabrication....

Challenges for scanning electron microscopy and inspection on the nanometer scale for non-IC application: And how to tackle them using computational techniques

In this paper key challenges posed on metrology by feature dimensions of 20nm and below are discussed. In detail, the need for software-based tools for SEM image acquisition and image analysis in environments where CD-SEMs are not available and/or not flexible enough to cover all inspection tasks is outlined. These environments include...