Stealth fiducial markers: Enhancing re-detection efficacy of defects on blank wafers

In this thesis a stealth fiducial marker system for blank wafers is designed, fabricated and validated. The goal of this marker system it to map the coordinates of TNO’s Rapid Nano (a fast optical inspection tool) to the coordinates of scanning electron microscopes and atomic force microscopes. This way defects, that have been detected in the...