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Tacx, Paul (author), Habraken, Roel (author), Witvoet, Gert (author), Heertjes, Marcel (author), Oomen, T.A.E. (author)Next-generation deformable mirrors are envisaged to exhibit low-frequency flexible dynamics and to contain a large number of spatially distributed actuators due to increasingly stringent performance requirements. The increasingly complex system characteristics necessitate identifying the flexible dynamic behavior for design validation and...journal article 2024