Multi-mirror adaptive optics for control of thermally induced aberrations in extreme ultraviolet lithography

Phase retrieval from multiple binary masks generated speckle patterns

Improving the Correction Quality of Deformable Mirrors with In-Plane Boundary Actuation

Improved Lens Aberration Estimation Using Model-Based Filtering, Applied to Lithographic DUV Imaging Systems

A High-Speed 40-channel USB 2.0 DAC for Adaptive Optics

A High-Speed 40-channel USB 3.0 DAC for Adaptive Optics

Optomechatronics Design and Control for Confocal Laser Scanning Microscopy

Wavefront coding with adaptive optics

Lensless coherent imaging by sampling of the optical field with digital micromirror device

Curvature sensing with a Shack-Hartmann sensor

Optimisation-based wavefront sensorless adaptive optics for microscopy

Fast & Furious focal-plane wavefront sensing

Distributed Wavefront Reconstruction for Adaptive Optics Systems

Optimization-based wavefront sensorless adaptive optics for multiphoton microscopy

Snapshot coherence-gated direct wavefront sensing for multi-photon microscopy

Adaptive Optics based on Liquid Total Internal Re?ection Mirrors

Adaptive Optics for EUV Lithography: Phase Retrieval for Wavefront Metrology

Adaptive Optics to Counteract Thermal Aberrations: System Design for EUV-Lithography with Sub-nm Precision

Receding-horizon adaptive contyrol of aero-optical wavefronts

Characterization and closed-loop performance of a liquid mirror adaptive optical system