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De Buck, P.B.A. (author)Lens set-up using PARIS (Parallel ILIAS) Lens set-up State of the art coarse lithographic lens set-up consists of ILIAS, FOCAL and DISTO tests. A proposal is done to phenomenologically represent gain and offset in each of the tests. A data-driven method to construct the model is introduced. This model can be related to a PARIS-based set-up test....master thesis 2014