Self-folding using capillary forces

Self-folding broadly refers to the assembly of 3D structures by bending, curving, and folding without the need for manual or mechanized intervention. Self-folding is scientifically interesting because examples of self-folded structures, from plant leaves to gut villi to cerebral gyri, abound in nature. From an engineering and technological...

3D Align overlay verification using glass wafers

In the MEMS world, increasing attention is being given to 3D devices requiring dual-sided processing. This requires lithography tools that are able to align a wafer to both its back side as front side. Overlay describes how well front and back side layers are positioned with respect to each other. Currently there is no simple and fast method to...