Toward 3D printed suspended microchannel resonators: A study on damping and mass resolution of 3D printed microbeam resonators

Biosensing properties like mass, density and stiffness on a single cell level can help diagnose diseases. Mass sensing of cells and subcellular components is typically performed with resonant microstructures. Recently such microstructures were fabricated using an emerging 3D printing technique called two-photon polymerization (2PP) contrary to...

Dynamic Characterization of Silicon Nitride Cantilevers

This thesis describes a series of experiments on dynamical characterization of silicon nitride cantilevers. These devices play an important role in micro-and nanoelectromechanical systems (MEMS and NEMS). They consist of a mechanical part, a sensor or actuator, and an electronic part for readout and control. The core of NEMS and MEMS, the so...