Print Email Facebook Twitter Toward 3D printed suspended microchannel resonators Title Toward 3D printed suspended microchannel resonators: A study on damping and mass resolution of 3D printed microbeam resonators Author de Winter, Jikke (TU Delft Mechanical, Maritime and Materials Engineering; TU Delft Precision and Microsystems Engineering; TU Delft Micro and Nano Engineering) Contributor Manzaneque Garcia, T. (mentor) Ghatkesar, M.K. (graduation committee) Degree granting institution Delft University of Technology Programme Mechanical Engineering | Micro and Nano Engineering Date 2022-11-18 Abstract Biosensing properties like mass, density and stiffness on a single cell level can help diagnose diseases. Mass sensing of cells and subcellular components is typically performed with resonant microstructures. Recently such microstructures were fabricated using an emerging 3D printing technique called two-photon polymerization (2PP) contrary to conventional lithography-based fabrication. The suspended microchannel resonator (SMR) is such a resonant microstructure with an embedded fluidic channel for buoyant mass sensing, which has not yet been fabricated using 2PP. This work aims to 3D print an SMR with a sufficient mass resolution to detect the buoyant mass of E. Coli bacteria (175 fg in water). It was realized by first characterizing the damping in 3D printed polymer microbeam resonators for a better understanding of dominating damping sources. Followed by maximizing their quality factor and fabricating a prototype 3D-printed SMR. The characterized devices set a record-breaking standard for damping of polymer microbeam resonators: Cantilevers and bridges approached quality factors of 1000 and tensile stressed narrow bridges achieved a quality factor of 1819. These polymer resonators were dominated by bulk friction damping, but still had a mass resolution advantage over similar silicon-based devices when working in lower quality factor (Q < 1000) conditions, due to the low mass density of the polymer. Subsequently, prototypes of the suspended microchannel resonator were fabricated with multi-scale 3D printing containing a plug-and-play connection to fluidics and measurement equipment. Their theoretical mass resolution was estimated to be ≤ 60 fg, which is sensitive enough to detect E. Coli bacteria and compete with conventional fabricated SMRs. This paves the path towards actual biosensing 3D printed SMRs with the capabilities of lithography-based fabricated devices but with additional design and fabrication flexibility. Subject Suspended Microchannel Resonator3D printingTwo-photon polymerizationPolymer microbeam resonatorDampingQuality factorMass sensingMass resolutionE. coli bacteria To reference this document use: http://resolver.tudelft.nl/uuid:752f5699-abab-443a-a363-be157f1e6045 Embargo date 2023-11-18 Part of collection Student theses Document type master thesis Rights © 2022 Jikke de Winter Files PDF 22_10_31_Thesis_final.pdf 46.58 MB Close viewer /islandora/object/uuid:752f5699-abab-443a-a363-be157f1e6045/datastream/OBJ/view