A One-step Approach for Centralized Overactuated Motion Control of a Prototype Reticle Stage

Next-generation motion stages are envisaged to be lightweight to meet stringent demands regarding accuracy and throughput. The lightweight stage design implies flexible dynamical behavior, which is foreseen to be severely excited due to increasing acceleration forces. The aim of this paper is to exploit additional actuators and sensors to...

Identification of an overactuated deformable mirror system with unmeasured outputs

Next-generation deformable mirrors are envisaged to exhibit low-frequency flexible dynamics and to contain a large number of spatially distributed actuators due to increasingly stringent performance requirements. The increasingly complex system characteristics necessitate identifying the flexible dynamic behavior for design validation and...