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SHANKAR, SHREYAS (author)Silicon-based MEMS technology has been the standard for developing 2D and 3D<br/>micro-structures for many years. There are 2 main classifications of MEMS manufacturing technologies, viz. bulk micro-machining, and surface micro-machining.<br/>These techniques have its own set of drawbacks. Bulk micro-machining affects the structural integrity of...master thesis 2021