Compensating commutation-angle domain disturbances with application to waveform optimization for piezo stepper actuators

Piezo stepper actuators are very promising for nanopositioning systems due to their high resolution, high stiffness, fast response, and the ability to position a mover over an infinite stroke by means of motion reminiscent of walking. The aim of this paper is to enhance the waveforms for actuating piezo steppers, by actively compensating for...

Piezo-driven stages for nanopositioning with extreme stability: Theoretical acpects and practical design considerations