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van de Ven, Oscar S. (author), Vogel, J.G. (author), Xia, Sha (author), Spronck, J.W. (author), Nihtianova, S. (author)
High-precision positioning often requires high speed and high resolution displacement measurements in order to compensate for the small vibrations of critical components. The displacement sensor must be precise and stable over a long period of time to avoid expensive recalibration. This requires tight mounting tolerances, which are especially...
journal article 2018