Screen Printed Fire-Through Contact Formation for Polysilicon-Passivated Contacts and Phosphorus-Diffused Contacts

In this article, we investigate the passivation quality and electrical contact properties for samples with a 150 nm thick n+ polysilicon layer in comparison to samples with a phosphorus diffused layer. High level of passivation is achieved for the samples with n+ polysilicon layer and an interfacial oxide underneath it. The contact properties...