de Vrijer, T. (author), van Dingen, Julian E.C. (author), Roelandschap, Paul J. (author), Roodenburg, Koos (author), Smets, A.H.M. (author) Amorphous and nano-crystalline germanium is of potential interest for a wide range of electronic, optical, opto-electronic and photovoltaic applications. In this work the influence of deposition temperature on hydrogenated germanium (Ge:H) films was characterized, using over 200 Ge:H and over 70 SiGe:H films. The demonstrated temperature...
journal article 2022
