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Searched for: subject%3A%22extended%255C+Nijboer%255C-Zernike%255C+theory%22
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Extended Nijboer-Zernike (ENZ) based mask imaging: Efficient coupling of electromagnetic field solvers and the ENZ imaging algorithm
Determination of resist parameters using the extended Nijboer-Zernike theory
Aerial image based lens metrology for wafer steppers
Aberration retrieval for high-NA optical systems using the Extended Nijboer-Zernike theory
Estimating resist parameters in optical lithography using the extended Nijboer-Zernike theory
Searched for: subject%3A%22extended%255C+Nijboer%255C-Zernike%255C+theory%22
(1 - 5 of 5)
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