Resetting Velocity Feedback: Reset Control for Active Damping

As the age of digitization evolves rapidly, there is an ever-increasing demand for improving precision and decreasing production times for industrial automation in general, and semiconductor manufacturing in particular. As these complex machines incorporate flexure-based elements to overcome friction and backlash, structural vibrations pose a...

A comparative study on distributed active damping of flexible systems

As systems become more lightweight, to satisfy inertia and size requirements, vibration becomes a prominent factor in their dynamics. This vibration is undesirable and various suppression methods exist such as passive, semi-active, and active. In this thesis, active control methods are explored for this purpose. The present technology utilizes...