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Verbree, J. (author)Three-dimensional stacked ICs (3D-SICs) based on Through-Silicon Vias (TSVs) is an emerging technology. It provides heterogeneous integration, higher performance and bandwidth, and lower power consumption. However, 3D-SICs suffer from lower compound yield, especially those based on Wafer-to-Wafer (W2W) stacking. In addition, testability of such...master thesis 2011