The design, build and verification of the Forcesix measurement setup: capable of observing low-level flow-induced vibration forces in 6-DOF

The goal of this study is to develop a measurement setup that can accommodate the water-cooled modules present in the innovative e-beam lithography tool developed by Mapper Lithography and to perform flow verfication measurements on them. The overall objective is to verify the stage-stability requirements set for the Matrix-machine with regards...