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Soman, S. (author), Pereira, S.F. (author), El Gawhary, O. (author)In recent years, a lot of works have been published that use parameter retrieval using orbital angular momentum (OAM) beams. Most make use of the OAM of different Laguerre-Gauss modes. However, those specific optical beams are paraxial beams and this limits the regime in which they can be used. In this paper, we report on the first results on...journal article 2022
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Bodermann, B. (author), Buhr, E. (author), Danzebrink, H.U. (author), Bär, M. (author), Scholze, F. (author), Krumrey, M. (author), Wurm, M. (author), Klapetek, P. (author), Hansen, P.E. (author), Korpelainen, V. (author), Van Veghel, M. (author), Yacoot, A. (author), Siitonen, S. (author), El Gawhary, O. (author), Burger, S. (author), Saastamoinen, T. (author)Supported by the European Commission and EURAMET, a consortium of 10 participants from national metrology institutes, universities and companies has started a joint research project with the aim of overcoming current challenges in optical scatterometry for traceable linewidth metrology. Both experimental and modelling methods will be enhanced...conference paper 2011