- document
-
Soman, S. (author), Horsten, R.C. (author), Scholte, T.C. (author), Pereira, S.F. (author)Inspection of surface and nanostructure imperfections play an important role in high-throughput manufacturing across various industries. This paper introduces a novel, parallelised version of the metrology and inspection technique: Coherent Fourier scatterometry (CFS). The proposed strategy employs parallelisation with multiple probes,...journal article 2024