Multi-beam coherent Fourier scatterometry

Inspection of surface and nanostructure imperfections play an important role in high-throughput manufacturing across various industries. This paper introduces a novel, parallelised version of the metrology and inspection technique: Coherent Fourier scatterometry (CFS). The proposed strategy employs parallelisation with multiple probes,...

Coating layer on samples with roughness: numerical study for coherent Fourier scatterometry

For the development of integrated circuits, the accompanying metrology inside the fabrication process is essential. Non-imaging metrology of nanostructure has to be quick and non-destructive. The multilayers are crucial components of today's microprocessor nanostructures and reflective coatings. Coherent Fourier scatterometry (CFS), which is...

Inverse Electromagnetics for EUV mask metrology and inspection

The importance of inverse problems is paramount in science and physics because their solution provides information about parameters that cannot be directly observed. This thesis discusses and details the application of a few inverse methods in optical imaging, metrology and inspection of lithographic targets, particularly patterned structures on...

Diffraction grating parameter retrieval using non-paraxial structured beams in coherent Fourier scatterometry

In recent years, a lot of works have been published that use parameter retrieval using orbital angular momentum (OAM) beams. Most make use of the OAM of different Laguerre-Gauss modes. However, those specific optical beams are paraxial beams and this limits the regime in which they can be used. In this paper, we report on the first results on...

Sub-wavelength metrology using Coherent Fourier Scatterometry

Scattering is the process in which some form of radiation is deviated from its trajectory by a localized non-uniformity it encounters. These non-uniformities, called objects, can be of different material and geometry which determines among many things, mainly, the amount and direction of the scattered radiation. Scatterometry is the branch of...

Coherent fourier scatterometry

The electronics which makes our lives easier like mobiles, computers, digital cameras contain chips with very small semiconductor components like transistors. When transistors can be made even smaller, the chip can accommodate a larger number of components, which gives more processing capacity, resulting in a faster device with an increased...

Joint Research on Scatterometry and AFM Wafer Metrology

Supported by the European Commission and EURAMET, a consortium of 10 participants from national metrology institutes, universities and companies has started a joint research project with the aim of overcoming current challenges in optical scatterometry for traceable linewidth metrology. Both experimental and modelling methods will be enhanced...