Diffraction grating parameter retrieval using non-paraxial structured beams in coherent Fourier scatterometry

In recent years, a lot of works have been published that use parameter retrieval using orbital angular momentum (OAM) beams. Most make use of the OAM of different Laguerre-Gauss modes. However, those specific optical beams are paraxial beams and this limits the regime in which they can be used. In this paper, we report on the first results on...

Coherent fourier scatterometry

The electronics which makes our lives easier like mobiles, computers, digital cameras contain chips with very small semiconductor components like transistors. When transistors can be made even smaller, the chip can accommodate a larger number of components, which gives more processing capacity, resulting in a faster device with an increased...