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Sidorkin, V. (author), Van der Drift, E.W.J.M. (author), Salemink, H. (author)
Performance of hydrogen silsesquioxane (HSQ) resist material with respect to the temperature during electron beam exposure was investigated. Electron beam exposure at elevated temperatures up to 90?°C shows sensitivity rise and slight contrast (?) degradation compared to lower temperature cases. Ultrahigh resolution structures formed at elevated...
journal article 2008
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Van der Heijden, R. (author), Carlström, C.F. (author), Snijders, J.A.P. (author), Van der Heijden, R.W. (author), Karouta, F. (author), Nötzel, R. (author), Salemink, H.W.M. (author), Kjellander, B.K.C. (author), Bastiaansen, C.W.M. (author), Broer, D.J. (author), Van der Drift, E. (author)
Polymer filling of the air holes of indium-phosphide-based two-dimensional photonic crystals is reported. After infiltration of the holes with a liquid monomer and solidification of the infill in situ by thermal polymerization, complete filling is proven using scanning electron microscopy. Optical transmission measurements of a filled photonic...
journal article 2006