Mechanical characterization of nanopillars by atomic force microscopy

Micro- and nano-patterns are gaining increasing attraction in several fields ranging from nanoelectronics to bioengineering. The mechanical properties of the nanostructures (nanopillars, nanotubes, nanowires, etc.) are highly relevant for many applications but challenging to determine. Existing mechanical characterization methods require...

Experimental setup for dynamic analysis of microand nano-mechanical systems in vacuum, gas, and liquid

An experimental setup to perform dynamic analysis of a micro- and nano-mechanical system in vacuum, gas, and liquid is presented. The setup mainly consists of a piezoelectric excitation part and the chamber that can be either evacuated for vacuum, or filled with gas or water. The design of the piezoelectric actuator was based on a Langevin...