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van Kessel, L.C.P.M. (author), Hagen, C.W. (author), Kruit, P. (author)
Background: Monte Carlo simulations of scanning electron microscopy (SEM) images ignore most surface effects, such as surface plasmons. Previous experiments have shown that surface plasmons play an important role in the emission of secondary electrons (SEs).Aim: We investigate the influence of incorporating surface plasmons into simulations...
journal article 2019