Lee, M. (author), Robin, M.P. (author), Guis, R.H. (author), Filippozzi, U. (author), Shin, D. (author), van Thiel, T.C. (author), Paardekooper, Stijn P. (author), Renshof, Johannes R. (author), van der Zant, H.S.J. (author), Caviglia, A. (author), Verbiest, G.J. (author), Steeneken, P.G. (author) Although 2D materials hold great potential for next-generation pressure sensors, recent studies revealed that gases permeate along the membrane-surface interface, necessitating additional sealing procedures. In this work, we demonstrate the use of free-standing complex oxides as self-sealing membranes that allow the reference cavity beneath...
journal article 2022
