Far-field sectioning for the retrieval of subwavelength grating parameters using coherent Fourier scatterometry

Optical inspection of periodic nanostructures is a major challenge in the semiconductor industry due to constantly decreasing critical dimensions. In this paper we combine coherent Fourier scatterometry (CFS) with a sectioning mask for subwavelength grating parameter determination. By selecting only the most sensitive regions of the scattered...

Detection and Evaluation of Pre-Preg Gaps and Overlaps in Glare Laminates

Gaps and overlaps between pre-preg plies represent common flaws in composite materials that can be introduced easily in an automated fibre placement manufacturing process and are potentially detrimental for the mechanical performances of the final laminates. Whereas gaps and overlaps have been addressed for full composite material, the topic...

Coherent Fourier scatterometry for detection of nanometer-sized particles on a planar substrate surface

Inspection tools for nano-particle contamination on a planar substrate surface is a critical problem in micro-electronics. The present solutions are either expensive and slow or inexpensive and fast but have low sensitivity because of limitations due to diffraction. Most of them are also substrate specific. In this article we report how Coherent...