Design and Manufacturing of an In-Package Relative Humidity Sensor with Multi-Width Interdigital Electrodes Towards Enhanced Sensitivity for Characterization of Packaging Encapsulation Materials

This study presents a novel manufacturing process and design towards an enhanced sensitivity of an in-package relative humidity sensor. The device comprises multi-width interdigital electrodes which make oxide pillars appear during wet chemical etching in the fabrication process. Those oxide pillars appear only in wider areas while completely...

Design Feasibility of an Energy-efficient Wrist Flexion-Extension Exoskeleton using Compliant Beams and Soft Actuators

Passive and active exoskeletons have been used over recent decades. However, regarding many physiological systems, we see that the majority explore both active and passive elements to minimize energy consumption while retaining proper motion control. In light of this, we propose a design that combines compliant mechanisms as passive support...