Design of a Snap Acting Pneumatic Relay to Reduce Air Loss in a Wafer Floating Air Film Conveyor

In the high-tech semiconductor industry floating air conveyors are used to transport and position silicon substrates. An interesting point for improvement is to limit the loss of pressurized air as conveyors are only effective at the position of the substrate.<br/>The goal of this research is to develop a local pneumatic valve, that is...