Searched for: subject%3A%22scanning%255C%252Belectron%255C%252Bmicroscopy%22
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Kievits, A.J. (author), Duinkerken, B. H.Peter (author), Fermie, Job (author), Lane, R. (author), Giepmans, Ben N.G. (author), Hoogenboom, J.P. (author)
Recent advances in electron microscopy techniques have led to a significant scale up in volumetric imaging of biological tissue. The throughput of electron microscopes, however, remains a limiting factor for the volume that can be imaged in high resolution within reasonable time. Faster detection methods will improve throughput. Here, we have...
journal article 2024
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Giasin, Khaled (author), Atif, Muhammad (author), Ma, Yuan (author), Jiang, Chulin (author), Koklu, Ugur (author), Sinke, J. (author)
GLARE laminates are multi-layered metal-composite materials created from bonding sheets of metallic alloys with carbon or glass fibre layers. The application of hybrid-conventional machining processes such as ultrasonic-assisted drilling (UAD) is becoming of great interest to the aerospace industry due to its capability in reducing the...
journal article 2022
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Lane, R. (author), Wolters, Anouk H.G. (author), Giepmans, Ben N.G. (author), Hoogenboom, J.P. (author)
Volume electron microscopy (EM) of biological systems has grown exponentially in recent years due to innovative large-scale imaging approaches. As a standalone imaging method, however, large-scale EM typically has two major limitations: slow rates of acquisition and the difficulty to provide targeted biological information. We developed a 3D...
journal article 2022
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Saeedifar, M. (author), Saghafi, Hamed (author), Mohammadi, Reza (author), Zarouchas, D. (author)
The present study evaluates the toughening capability of electrospun PA66 nanofibers for carbon/epoxy composite laminates subjected to mode II loading conditions at elevated temperatures. The Dynamic Mechanical Analysis (DMA) test showed that the glass transition temperature of the produced nanofibers is in a range of ∼60–80 °C. Accordingly,...
journal article 2021
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Hari, S. (author), Trompenaars, P. H.F. (author), Mulders, J. J.L. (author), Kruit, P. (author), Hagen, C.W. (author)
High resolution dense lines patterned by focused electron beam-induced deposition (FEBID) have been demonstrated to be promising for lithography. One of the challenges is the presence of interconnecting material, which is often carbonaceous, between the lines as a result of the Gaussian line profile. We demonstrate the use of focused electron...
journal article 2021
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van Kessel, L.C.P.M. (author), Huisman, T.A. (author), Hagen, Cornelis W. (author)
Background: Line-edge roughness (LER) is often measured from top-down critical dimension scanning electron microscope (CD-SEM) images. The true three-dimensional roughness profile of the sidewall is typically ignored in such analyses. Aim: We study the response of a CD-SEM to sidewall roughness (SWR) by simulation. Approach: We generate...
journal article 2020
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Mahgoub, A.M.I.M. (author), Lu, Hang (author), Thorman, Rachel M. (author), Preradovic, Konstantin (author), Jurca, Titel (author), McElwee-White, Lisa (author), Fairbrother, Howard (author), Hagen, C.W. (author)
Two platinum precursors, Pt(CO)<sub>2</sub>Cl<sub>2</sub> and Pt(CO)<sub>2</sub>Br<sub>2</sub>, were designed for focused electron beam-induced deposition (FEBID) with the aim of producing platinum deposits of higher purity than those deposited from commercially available precursors. In this work, we present the first deposition experiments...
journal article 2020
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van Kessel, L.C.P.M. (author), Huisman, T. (author), Hagen, C.W. (author)
Line-edge roughness (LER) is often measured from top-down critical dimension scanning electron microscope (CD-SEM) images. The true three-dimensional roughness profile of the sidewall is typically ignored in such analyses. We study the response of a CD-SEM to sidewall roughness (SWR) by simulation. We generate random rough lines and spaces,...
conference paper 2020
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Zhang, L. (author), Garming, M.W.H. (author), Hoogenboom, J.P. (author), Kruit, P. (author)
Electrostatic beam blankers are an alternative to photo-emission sources for generating pulsed electron beams for Time-resolved Cathodoluminescence and Ultrafast Electron Microscopy. While the properties of beam blankers have been extensively investigated in the past for applications in lithography, characteristics such as the influence of...
journal article 2020
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van Kessel, L.C.P.M. (author), Hagen, C.W. (author), Kruit, P. (author)
Background: Monte Carlo simulations of scanning electron microscopy (SEM) images ignore most surface effects, such as surface plasmons. Previous experiments have shown that surface plasmons play an important role in the emission of secondary electrons (SEs).Aim: We investigate the influence of incorporating surface plasmons into simulations...
journal article 2019
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van Kessel, L.C.P.M. (author), Hagen, C.W. (author), Kruit, P. (author)
We have investigated the contributions of surface effects to Monte Carlo simulations of top-down scanning electron microscopy (SEM) images. The elastic and inelastic scattering mechanisms in typical simulations assume that the electron is deep in the bulk of the material. In this work, we correct the inelastic model for surface effects. We...
conference paper 2019
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Guatame-Garcia, Adriana (author), Buxton, M.W.N. (author)
Diatomite, a rock formed by the accumulation of opaline diatom frustules, is a preferred raw material for the manufacturing of filters. Its uniqueness relies on the high porosity and inertness of the frustules. The presence of carbonates in some diatomite ores hinders these properties. The~purpose of this study was to identify the type of...
journal article 2018
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Ioannidou, C. (author), Arechabaleta Guenechea, Z. (author), Rijkenberg, Arjan (author), Dalgliesh, Robert M. (author), van Well, A.A. (author), Offerman, S.E. (author)
Nanosteels are used in automotive applications to accomplish resource-efficiency while providing high-tech properties. Quantitative data and further understanding on the precipitation kinetics in Nanosteels can contribute to fulfil this goal. Small-Angle Neutron Scattering measurements are performed on a Fe-C-Mn-V steel, previously heat-treated...
journal article 2018
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Weppelman, I.G.C. (author), Moerland, R.J. (author), Hoogenboom, J.P. (author), Kruit, P. (author)
We present a new method to create ultrashort electron pulses by integrating a photoconductive switch with an electrostatic deflector. This paper discusses the feasibility of such a system by analytical and numerical calculations. We argue that ultrafast electron pulses can be achieved for micrometer scale dimensions of the blanker, which are...
journal article 2018
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Bolten, Jens (author), Arat, K.T. (author), Ünal, Nezih (author), Porschatis, Caroline (author), Wahlbrink, Thorsten (author), Lemme, Max C. (author)
In this paper key challenges posed on metrology by feature dimensions of 20nm and below are discussed. In detail, the need for software-based tools for SEM image acquisition and image analysis in environments where CD-SEMs are not available and/or not flexible enough to cover all inspection tasks is outlined. These environments include...
conference paper 2017
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Ren, Y. (author), Kruit, P. (author)
Our group is developing a multibeam scanning electron microscope (SEM) with 196 beams in order to increase the throughput of SEM. Three imaging systems using, respectively, transmission electron detection, secondary electron detection, and backscatter electron detection are designed in order to make it as versatile as a single beam SEM. This...
journal article 2016
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Verduin, T. (author), Lokhorst, S.R. (author), Hagen, C.W. (author), Kruit, P. (author)
In the simulation of secondary electron yields (SEY) and secondary electron microscopy (SEM) images, there is always the question: are we using the correct scattering cross-sections?. The three scattering processes of interest are quasi-elastic phonon scattering, elastic Mott scattering and inelastic scattering using the dielectric function...
journal article 2016
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Narváez, A.C. (author)
Cathodoluminescence (CL), the excitation of light by an electron beam, has gained attention as an analysis tool for investigating the optical response of a structure, at a resolution that approaches that in electron microscopy, in the nanometer range. However, the application possibilities are limited because the use of transparent substrates,...
doctoral thesis 2014
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Verduin, T. (author), Kruit, P. (author), Hagen, C.W. (author)
We investigated the off-line metrology for line edge roughness (LER) determination by using the discrete power spectral density (PSD). The study specifically addresses low-dose scanning electron microscopy (SEM) images in order to reduce the acquisition time and the risk of resist shrinkage. The first attempts are based on optimized elliptic...
journal article 2014
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Sakic, A. (author)
doctoral thesis 2012
Searched for: subject%3A%22scanning%255C%252Belectron%255C%252Bmicroscopy%22
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