Terahertz Band-Pass Filters for Wideband Superconducting On-chip Filter-bank Spectrometers

A superconducting microstrip half-wavelength resonator is proposed as a suitable band-pass filter for broadband moderate spectral resolution spectroscopy for terahertz (THz) astronomy. The proposed filter geometry has a free spectral range of an octave of bandwidth without introducing spurious resonances, reaches a high coupling efficiency in...

Highly-conformal sputtered through-silicon vias with sharp superconducting transition

This paper describes the microfabrication and electrical characterization of aluminum-coated superconducting through-silicon vias (TSVs) with sharp superconducting transition above 1 K. The sharp superconducting transition was achieved by means of fully conformal and void-free DC-sputtering of the TSVs with Al, and is here demonstrated in up...

Superconducting High-Aspect Ratio Through-Silicon Vias with DC-Sputtered Al for Quantum 3D integration

This paper presents the fabrication and electrical characterization of superconducting high-aspect ratio through-silicon vias DC-sputtered with aluminum. Fully conformal and void-free coating of 300 μm-deep and 50 μmwide vias with Al, a CMOS-compatible and widely available superconductor, was made possible by tailoring a funneled sidewall...

Superconductor-insulator transition in nanowires and nanowire arrays

Superconducting nanowires are the dual elements to Josephson junctions, with quantum phase-slip (QPS) processes replacing the tunneling of Cooper pairs. When the QPS amplitude ES is much smaller than the inductive energy EL, the nanowire responds as a superconducting inductor. When the inductive energy is small, the response is capacitive. The...