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Ma, Y. (author), Rejaei, B. (author), Zhuang, Y. (author)We present a novel shielding method for on-chip transmission lines built on conductive silicon substrates. The shield consists of an artificial dielectric with a very high in-plane dielectric constant, built from two patterned metal layers isolated by a very thin dielectric film. Inserted below an integrated coplanar transmission line, the...journal article 2008