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Barends, R. (author), Hortensius, H.L. (author), Zijlstra, T. (author), Baselmans, J.J.A. (author), Yates, S.J.C. (author), Gao, J.R. (author), Klapwijk, T.M. (author)We study NbTiN resonators by measurements of the temperature dependent resonance frequency and frequency noise. Additionally, resonators are studied covered with SiOx dielectric layers of various thicknesses. The resonance frequency develops a nonmonotonic temperature dependence with increasing SiOx layer thickness. The increase in the noise is...journal article 2008