A Kemmeren | TU Delft Repository

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A Kemmeren

Conference paper (1)

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1

Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications

Conference paper (2005) - SBS Heil (author) , E Langereis (author) , F Roozeboom (author) , A Kemmeren (author) , NP Pham (author) , P. M. Sarro (author) , MCM van de Sanden (author) , W. M.M. Kessels (author)