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A Kemmeren
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Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications
Conference paper -
SBS Heil
,
E Langereis
,
F Roozeboom
,
A Kemmeren
,
NP Pham
,
Pasqualina M Sarro
,
MCM van de Sanden
,
WMM Kessels