This work presents a superconducting microwave resonator that is both frequency tunable and compatible with photolithography. This design is well-suited for integration with electro-optic devices. We demonstrate tuning ranges exceeding 500 MHz, using a bulk permanent magnet, and 100 MHz, using planar coils, under moderate magnetic fields (below 5 mT).

We present frequency-tunable, photolithography compatible superconducting microwave resonators designed for integration with electro-optic devices. We demonstrate >500 MHz of tuning with a bulk permanent magnet and > 1 00 MHz of tuning with planar coils under moderate (<5 mT) magnetic fields.