Design figuring and measurement of a correction plate for a wafer stepper.

Faust en Wagner, machineontwerp en processimulatie

The design, figuring process and measurement of a correctrion plate for a wafer stepper

Faust and Wagner: machine design and process simulation

The generation of on-axis and off-axis conic surfaces of revolution by applyinga tubular tool

TIGO-SLR Manual, volume V: Optical components identification list, coating examples and overall efficiency estimations

Loose abrasive line-contact machining of aspherical optical surfaces of revolution

FAUST: generation of conic surfaces Optical Fabrication and Testing Technical Digest

Equivalent layers: another way to look at them

Fabrication of Aspherical Ultraprecise Surfaces using a Tube (FAUST) Optical Fabrication and Testing, Technical Digest

FAUST: het vervaardigen van conische oppervlakken

Vervaardigen van asferische oppervlakken met behulp van een buis