G. Di Giuseppe

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Journal article (1)

1 records found

Microfabrication of large-area circular high-stress silicon nitride membranes for optomechanical applications

Journal article (2016) - E. Serra , M. Bawaj , B. Morana , R. Natali , G. Pandraud , A. Pontin , G.A. Prodi , M. Rossi , P.M. Sarro , D. Vitali , M. Bonaldi , A. Borrielli , G. Di Giuseppe , S. Forte , N. Kralj , N. Malossi , L. Marconi , F. Marin , F. Marino

In view of the integration of membrane resonators with more complex MEMS structures, we developed a general fabrication procedure for circular shape SiN_x membranes using Deep Reactive Ion Etching (DRIE). Large area and high-stress SiN_x membrane ...