Library
search
local_library
Repository
CS
CAM Steenbergen
View Pure Profile
Authored
2 records found
Plasma-enhanced chemical vapor deposition of thick silicon nitride films with low stress on inP.
Journal article -
L Shi
,
CAM Steenbergen
,
AH de Vreede
,
MK Smit
,
TLM Scholtes
,
FH Groen
,
JW Pedersen
Compact low-loss 8x10 Ghz polarisation independent WDM receiver
Conference paper -
CAM Steenbergen
,
C. Dam
,
A Looijen
,
CGP Herben
,
M. de Kok
,
MK Smit
,
JW Pedersen
,
I Moerman
,
RG Baets
,
BH Verbeek